Jeff:LabNotes/Microarray Fabrication
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1/11/09
Protocol for microarray fabrication[edit]
-Clean glass slide with isopropanol, wash with water, and dry
-Place glass slide on spinner, add SU-8, and spin at 500 rpm for 10 sec and then 2000 rpm for 30 sec. This will create a 50 um thickness
-Soft bake the slide. Begin heating at 65 C for 6 mins. Then slowly ramp up the temperature in intervals of 5 C until 95 C is reached. Then heat at 95 C for 20 mins.
-Expose slide to the mask under UV light for 30 secs.
-Soft bake the slide for 1 min at 65 C, slowly ramp up to 95 C using the same procedure, and heat at 95 C for 5 mins.
-Develop the slide in SU-8 developer for 6 mins, gently agitating the solution
-Rinse the developer off the slide with water